Non-contact defects inspection
Vision systems have a dual role: to provide a good quality image of the sample surface at the desired magnification and to process the image in order to detect and analyze certain predefined features or textures.
Although processing units are becoming more and more powerful, the main limitation of current vision systems is their very small depth of field (a few tens of µm or less, depending on the magnification and numerical aperture).
Because of this limitation, expensive and complicated Z-scanning systems and/or an automatic focusing mechanism are required to visualize samples with larger Z-extension as well as moving ones.
Defect inspection solution from STIL / MC2 family of products offers a depth of focus a hundred times larger than actual vision solution that reduce pressure on focusing solution and translation/carrier flatness.
