Precision systems for non-contact
surface inspection, measurement, analysis, and visualization
Viking - R enables scanning of the required surface at a high speed and, reliable optical data acquisition down to below 10nm resolution. Roughness is automatically calculated according to ISO standard and, based on acceptance level, the outcome is clear indication of pass/fail quality control.
Surface roughness is a critical element that affects both functionality and final quality of a product. That’s why a fast and accurate inspection allows to identify the defective products in time and optimize production line conditions.
An economical 3D profilometer that meets a wide variety of surface inspection needs.
The Viking is an optical non-contact profilometer for affordable 3D surface and roughness measurements. Its small footprint and light weight design makes it ideal as a desktop 3D measurement tool. It is designed to meet mid-range accuracy and quality control needs using state-of-the-art sensor technology to generate 3D surface topography maps and ISO compliant roughness information.
The new Phoenix Desktop 3D surface measuring system
from Solarius enables highly accuracy and precise 3D
surface inspection. Thanks to high precision data acquisition,
data processing allows a complete 3D reconstruction of the
profile and extract required feature to be measured.
Phoenix 3D Optical Desktop system is based on Chromatic
Confocal technology, which allows nanometric axial
resolution without moving the part and without ambient
light interference.
High-end 3D surface metrology for most demanding measuring tasks on complex surfaces.
The new Polaris Desktop 3D surface measuring system from Solarius enables highly accurate and precise 3D imaging of surfaces. While the Polaris and the Polaris Plus are equal in accuracy and precision, the Polaris offers a cost effective variant for many applications. The Polaris Plus expands the scope of application due to its extensive equipment, which supports in particular simple automation of the measurement tasks.
The AOP platform is the standalone Solarius solution for all kinds of standard and customized measurement tasks. Depending on the specific function, it can be equipped with different 3D measuring sensor, motion system and Data Analysis software. As standard AOP models, we show here AOP-PCI for Semiconductor, AOP-MDS for Medical and AOP-TTV for new Energy applications.
High-end 3D surface metrology, with accuracy and precision down to the nanometer for most demanding measuring tasks on complex surfaces.
- Highest optical and digital resolution
- Easy change over for handling different probe card types
- Fast cycle times for a quick feedback loop
- Easy setup with importing existing coordinate files
- Full SECS/GEM integration and E84 compliance (optional)
- Probemark Inspection (optional)
- Removes operator error in finding deformities
- Finds pocket defects not visible to an operator
- Increases throughput in Quality Control (100% Inspection)
- Allows for drift in position and size of pockets to be monitored
- Shows easily readable graphics of where issues are on each measured part
A state of the art DUAL SENSOR TTV metrology for SIMULTANEOUS dual side geometry measurements.
- Fast and accurate thickness measurement
- Modular design
- High throughput by a large measurement area
- Flexible and easy to automate
- Customized user interface
- Customized data analysis
- Non-contact and non-destructive
The SIMP is the all-new Solarius high-end process platform for the inspection of elements fabricated in semiconductor processes such as ICs, micro lenses or MEMS. The platform allows handling of all wafer sizes and types, including thin and Taiko wafers. The completely redeveloped SEMI compliant Win10 software platform allows a simple and intuitive operation in a contemporary look and feel.
The SIMP allows the integration of all optical sensor technologies available in the Solarius product portfolio as well as the combination of several sensors. The SIMP is available in modular concepts for 200/300 millimeter wafers as well as for up to 200 millimeter wafers to ensure optimal use of manufacturing space.
Both versions of the platform come with the new Win10 SEMI compliant user interface, which makes it easy to intuitively teach new products and provide error-proofing. In addition, an FDA-compliant audit trail is available as an option meeting international requirements and standards in the medical sector.
